Starting Advanced Process Control, APC

Each year we hear that more and more companies have implemented APC in their manufacturing operation, first at the tool level and then at the fab wide level. Now, there is another level to be considered, the facilities supplied gasses, water, etc.. The observed variation in these parameters makes it imperative that they be precision controlled to achieve precision processing in leading edge Fabs. All process manufacturing operations as well as Fabs want and need to improve productivity, reduce costs, save materials and improve their environmental impact. Further, it is now practical and economical to implement the first step in the implementation process, data acquisition, using non-invasive wireless technology for older tools as well as well facilities parameters. We intend to describe how to get started and achieve net saving in a short time
For older Fabs, the argument that APC is too expensive is heard over and over again. It is simply not true and it is possible to get started by inexpensively collecting data in key supply areas to indentify the magnitude and extent of the possible savings areas.
It is our intent over the next few weeks to discuss how to get started and where you might expect to save dollars, resources and make your process manufacturing operation more productive.
Dick Deininger